Engineering
Electrostatics
100%
Resonator
64%
Microelectromechanical System
50%
Dynamic Response
25%
Piezoelectric
23%
Internals
20%
Dielectrics
19%
Actuation
18%
Plane Motion
16%
Buckling
14%
Micromirrors
14%
Rotors
14%
Good Agreement
13%
Directional
11%
Polysilicon
10%
Energy Engineering
10%
Functional Form
9%
Static Response
9%
Finite Element Simulation
9%
Applied Voltage
9%
Electrostatic Field
9%
Computer Aided Design
8%
Strain Energy
8%
Piezoelectric Structure
8%
Cantilever Beam
8%
Quality Factor
8%
Test Structure
8%
Flexure
8%
Harmonics
7%
Anisotropic
7%
Switching Time
7%
Resonance Frequency
7%
Residual Stress
7%
Numerical Scheme
7%
Computer Simulation
7%
Bottom Surface
7%
Pull-in Voltage
6%
Crystalline Silicon
6%
Energy Function
6%
Degree of Freedom
6%
Parallel-Plate Actuator
6%
Experimental Measurement
6%
Voltage Driving
6%
Bonding Wire
5%
Silicon Device
5%
Finite Number
5%
External Signal
5%
Constitutive Model
5%
Nonlinearity
5%
Isotropy
5%
Keyphrases
Electrostatic Actuator
50%
Actuator
34%
Dynamic Response
30%
Resonator
29%
Electromechanical Response
25%
Gap Closing
18%
Parametric Resonator
18%
Actuation
17%
Electrostatic Resonators
15%
Electromechanical Buckling
14%
Floating Electrode
14%
MEMS Devices
14%
Stiffness
13%
Interdigitated Electrodes
13%
Out-of-plane Motion
12%
Electrostatic MEMS
12%
Prestress
12%
Resonant Frequency
12%
Microbeam
11%
Micromirror
11%
Dielectric
11%
Electrostatic Field
11%
Pull-in Parameters
11%
Electrostatic Force
10%
Voltage Source
9%
Dielectric Charging
9%
Electrostatic Switch
9%
Polysilicon
9%
Rotor
9%
Charge Control
8%
Elastic Foundation
8%
Extraction Algorithm
8%
Nonlinear Spring
8%
Folded-beam Suspension
8%
RF MEMS Switch
8%
Piezoelectric Structure
8%
Static Response
8%
Comb-drive
8%
Hypersurface
8%
Functional Form
8%
Switching Time
8%
Thermoelastic
8%
Cantilever Beam
7%
Analytic Solution
7%
Analytic Expression
7%
Anti-spring
7%
Extended Range
7%
Double-sided
7%
Voltage-driven
7%
Floating Rotor
7%
