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Yael Nemirovsky

Professor Emeritus

 https://orcid.org/0000-0002-0274-472X
    1966 …2025

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    • 2022

      New Sensing Systems for Securing Virtual Walls at Outdoor Based on True Differential Digital TMOS

      Blank, T., Brouk, I., Bar-Lev, S., Amar, G., Meltsin, M., Katz, A., Vaiana, M., Castagna, M. E., Malfa, A. L., Bruno, G. & Nemirovsky, Y., 2022, IEEE International Symposium on Circuits and Systems, ISCAS 2022. p. 1175-1179 5 p. (Proceedings - IEEE International Symposium on Circuits and Systems; vol. 2022-May).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2021

      Study of a Voltage-Mode Readout Configuration for Micromachined CMOS Transistors for Uncooled IR Sensing

      Moisello, E., Vaiana, M., Castagna, M. E., Bruno, G., Bronk, I., Blank, T., Bar-Lev, S., Nemirovsky, Y., Malcovati, P. & Bonizzoni, E., 21 Feb 2021, 2021 IEEE 12th Latin American Symposium on Circuits and Systems, LASCAS 2021. 9459117. (2021 IEEE 12th Latin American Symposium on Circuits and Systems, LASCAS 2021).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2020

      High vacuum wafer level packaging for uncooled infrared sensor

      Urquia, M. A., Allegato, G., Paleari, S., Tripodi, F., Oggioni, L., Garavaglia, M., Nemirovsky, Y. & Blank, T., Jun 2020, 2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020. 9139148. (2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2019

      Catalytic Gas Sensor Based on Micro Machined CMOS Transistor

      Shlenkevitch, D., Avraham, M., Stolyarova, S., Blank, T. & Nemirovsky, Y., Nov 2019, 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019. 8958440. (2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Modeling the missing part of CMOS silicon photomultiplier: The ultimate photon counting and timing sensor

      Eshkoli, A., Nemirovsky, A. & Nemirovsky, Y., 2019, Advanced Photon Counting Techniques XIII. Itzler, M. A., Bienfang, J. C. & McIntosh, K. A. (eds.). 109780H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10978).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Modeling the thermal performance of a packaged MEMS thermal sensor at wide pressure range for IoT applications

      Avraham, M., Shabtay, A., Shlenkevitch, D., Stolyarova, S., Blank, T. & Nemirovsky, Y., Nov 2019, 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019. 8958080. (2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2018

      A stochastic approach for optimizing the required number of sub-pixels in Silicon Photomultipiler (SiPM) for optical radar applications (LiDAR)

      Eshkoli, A. & Nemirovsky, Y., 2 Jul 2018, 2018 IEEE International Conference on the Science of Electrical Engineering in Israel, ICSEE 2018. 8646031. (2018 IEEE International Conference on the Science of Electrical Engineering in Israel, ICSEE 2018).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2017

      CMOS-SOI-NEMS uncooled infrared presence sensor

      Zviagintsev, A., Blank, T., Bar-Lev, S., Brouk, I., Bloom, I. & Nemirovsky, Y., 4 Jan 2017, 2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016. 7806034. (2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Design considerations of CMOS Si photomultiplier for long range LIDAR

      Katz, A., Eshkoli, A., Feningstein, A., Jakobson, C. & Nemirovsky, Y., 28 Jun 2017, 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017. p. 1-4 4 p. (2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017; vol. 2017-November).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Micro-machined CMOS-SOI transistor (TMOS) thermal sensor operating in air

      Zviagintsev, A., Blank, T., Brouk, I., Bar-Lev, S., Stolyarova, S., Svetlitza, A., Bloom, I., Nemirovsky, A. & Nemirovsky, Y., 28 Jun 2017, 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017. p. 1-4 4 p. (2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017; vol. 2017-November).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Prototype of real-time single photon avalanche diode-based muzzle flash detector

      Vainstein, C., Katz, A., Birk, Y. & NEMIROVSKY, Y., 28 Jun 2017, 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017. p. 1-4 4 p. (2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017; vol. 2017-November).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Temperature sensing circuits in CMOS-SOI technology

      Malits, M., Brouk, I. & Nemirovsky, Y., 28 Jun 2017, 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017. p. 1-5 5 p. (2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017; vol. 2017-November).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2015

      Comprehensive comparison of integrated temperature sensors in CMOS-SOI technology

      Malits, M. & Nemirovsky, Y., 17 Dec 2015, 2015 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2015. 7360443. (2015 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2015).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Gun muzzle flash detection using a single photon avalanche diode array in 0.18μm CMOS technology

      Savuskan, V., Jakobson, C., Merhav, T., Shoham, A., Brouk, I. & Nemirovsky, Y., 2015, Advanced Photon Counting Techniques IX. Campbell, J. C. & Itzler, M. A. (eds.). 94920N. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9492).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Modeling of CMOS-SOI-MEMS thermal antenna for monolithic passive uncooled THz imagers

      Svetlitza, A., Blank, T., Stolyarova, S., Brouk, I., Bar-Lev, S. & Nemirovsky, Y., 2 Oct 2015, OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings. 7288884. (International Conference on Optical MEMS and Nanophotonics; vol. 02-05-August-2015).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Self- heating effects in CMOS-SOI-NEMS transistors for uncooled passive IR sensors

      Zviagintsev, A., Brouk, I., Bloom, I. & Nemirovsky, Y., 17 Dec 2015, 2015 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2015. 7360489. (2015 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2015).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2014

      Design and simulations of CMOS-SOI-NEMS thermal antenna and sensors for passive uncooled THz imaging

      Svetlitza, A., Blank, T., Stolyarova, S., Brouk, I., Bar-Lev, S. & Nemirovsky, Y., 2014, 2014 IEEE 28th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2014. 7005762. (2014 IEEE 28th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2014).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • High performance integrated inductors for power management applications

      Eshkoli, A., Bar-Lev, S., Peled, G., Nemirovsky, Y., Parag, A. & Shapira, S., 2014, 2014 IEEE 28th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2014. 7005731. (2014 IEEE 28th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2014).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Low frequency noise in surface and buried channel nanometric CMOS transistors

      Malits, M., Brouk, I., Nemirovsky, Y., Birman, A., Lahav, A. & Fenigstein, A., 2014, 2014 IEEE 28th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2014. 7005756. (2014 IEEE 28th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2014).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Voltage and current integrated readout for uncooled passive IR sensors based on CMOS-SOI-NEMS technology

      Zviagintsev, A., Bloom, I., Brouk, I. & Nemirovsky, Y., 2014, 2014 IEEE 28th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2014. 7005758. (2014 IEEE 28th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2014).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2013

      Gun muzzle flash detection using a CMOS single photon avalanche diode

      Merhav, T., Savuskan, V. & Nemirovsky, Y., 2013, Electro-Optical and Infrared Systems: Technology and Applications X. 88960H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8896).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Gun muzzle flash detection using CMOS sensors

      Merhav, T., Savuskan, V. & Nemirovsky, Y., 2013, 2013 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2013. 6685317. (2013 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2013).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2012

      CMOS DC to DC switched converter with on chip inductors

      Shapira, S., Unikovski, A., Peled, G., Cristea, D., Rotman, E., Eshkoli, A., Svetlitza, A. & Nemirovsky, Y., 2012, Proceedings of the 2012 24th International Symposium on Power Semiconductor Devices and ICs, ISPSD'12. p. 69-72 4 p. 6229025. (Proceedings of the International Symposium on Power Semiconductor Devices and ICs).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Radiation sensor based on a floating gate device

      Pikhay, E., Nemirovsky, Y., Roizin, Y., Dayan, V., Lavrenkov, K., Leibovich, Y. & Epstein, D., 2012, 2012 IEEE 27th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2012. 6377101. (2012 IEEE 27th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2012).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • The influence of thermoelectric effects on the self-heating of nanometer CMOS-SOI devices

      Malits, M., Svetlitza, A., Manzhosov, E., Rotman, N. & Nemirovsky, Y., 2012, 2012 IEEE 27th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2012. 6376970. (2012 IEEE 27th Convention of Electrical and Electronics Engineers in Israel, IEEEI 2012).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • The TeraMOS sensing pixel for monolithic passive uncooled THz imagers

      Svetlitza, A., Brouk, I., Bar-Lev, S., Stolyarova, S. & Nemirovsky, Y., 2012, 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012. p. 123-124 2 p. 6318833. (International Conference on Optical MEMS and Nanophotonics).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2011

      CMOS DC to DC switched converter with on chip inductors

      Svetlitza, A., Shapira, S., Unikovski, A., Peled, G., Brouk, I. & Nemirovsky, Y., 2011, 2011 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2011. 6105862. (2011 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2011).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Microcantilevers as a sensitive platform for detection of volatile substances and explosives

      Shemesh, A., Valitov, M., Litvinov, A., Blank, T., Stolyarova, S., Eichen, Y. & Nemirovsky, Y., 2011, 2011 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2011. 6105879. (2011 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2011).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Revisiting thermal effects in submicron CMOS-SOI transistors

      Malits, M., Svetlitza, A., Corcos, D., Elad, D. & Nemirovsky, Y., 2011, 2011 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2011. 6105858. (2011 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2011).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • The TeraMOS sensor for monolithic passive THz imagers

      Corcos, D., Brouk, I., Malits, M., Svetlitza, A., Stolyarova, S., Abramovich, A., Farber, E., Bachar, N., Elad, D. & Nemirovsky, Y., 2011, 2011 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2011. 6105883. (2011 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2011).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2010

      Porous silicon as a nanostructured template for enhanced immobilization and crystallization of inorganic and biomaterials

      Stolyarova, S. & Nemirovsky, Y., 2010, Pits and Pores 4: New Materials and Applications - In Memory of Ulrich Gosele. 16 ed. p. 137-145 9 p. (ECS Transactions; vol. 33, no. 16).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2009

      CMOS-SOI-MEMS transistor (TeraMOS) for Terahertz Imaging

      Corcos, D., Goren, D. & Nemirovsky, Y., 2009, 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009. 5386033. (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Constant loss miniature 45nm RF-CMOS 24 GHz phase shifter

      Zlotnikov, T. V., Degani, O. & Nemirovsky, Y., 2009, 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009. 5386073. (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • High performance MEMS 0.18μm RF-CMOS transformers

      Katz, S., Brouk, I., Stolyarova, S., Shapira, S. & Nemirovsky, Y., 2009, 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009. 5386016. (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • High tuning range MEMS capacitor for microwave applications

      David, E., Zlotnikov, T., Gal, L., Lavie, O. & Nemirovsky, Y., 2009, 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009. 5386051. (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • MEMS tunable capacitor with wide tuning range using multiple voltage sources

      Lavy, O., Gal, L., Weicherman, D., Stolyarova, S., David, E., Saad, A. & Nemirovsky, Y., 2009, 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009. 5386045. (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Microcantilevers as artificial nose platform

      Shemesh, A., Eichen, Y., Stolyarova, S. & Nemirovsky, Y., 2009, 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009. 5386023. (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2008

      Analysis of noise in CMOS image sensor

      Brouk, I., Nemirovsky, A. & Nemirovsky, Y., 2008, 2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008. 4562800. (2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • CMOS-SOI-MEMS transistor (TMOS) for infrared imaging

      Gitelman, L., Gutman, Z., Bar-Lev, S., Stolyarova, S. & Nemirovsky, Y., 2008, 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. p. 172-173 2 p. 4607884. (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • High performance MEMS 0.18μm RF- CMOS inductors

      Yishay, R. B., Stolyarova, S., Shapira, S. & Nemirovsky, Y., 2008, 2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008. 4562816. (2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Hybrid approach for RF MEMS devices

      Aharon, O., Gal, L. & Nemirovsky, Y., 2008, 2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008. 4562834. (2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • MEMS composite porous silicon/polysilicon cantilever sensor for enhanced triglycerides biosensing

      Fernandez, R. E., Chadha, A., Bhattacharya, E., Stolyarova, S. & Nemirovsky, Y., 2008, 2008 IEEE Sensors, SENSORS 2008. p. 1468-1471 4 p. 4716722. (Proceedings of IEEE Sensors).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • NEMS/MEMS cantilever-based biosensors: Addressing the open issues

      Nemirovsky, Y., Shemesh, A. & Stolyarova, S., 2008, MEMS, MOEMS, and Micromachining III. 699302. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6993).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • TMOS novel uncooled sensors - theory and practice

      Gitelman, L., Gutman, Z., Bar-Lev, S., Stolyarova, S. & Nemirovsky, Y., 2008, 2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008. 4562831. (2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2007

      A microfabricated bio-sensor for erythrocytes deformability and volume distributions analysis

      Branksy, A., Korin, N., Nemirovski, Y. & Dinnar, U., 2007, Biomedical Applications of Micro- and Nanoengineering III. 64160O. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6416).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • MEMS Composite Porous Silicon/Polysilicon Cantilevers for Biosensing Applications

      Stoliarov, S., Fernandez, R. E., Chadha, A., Bhattacharya, E. & Nemirovsky, Y., 2007, 3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs.

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • 2005

      A novel (SALA) system for crystallization and doping in low-temperature poly-Si thin-film transistors

      Ishihara, R., Glazed, A., Raab, Y., Rusian, P., Dorfan, M., Lavi, B., Leizerson, I., Kishinevsky, A., Van Aandel, Y., Cao, X., Metselaar, J. W., Beanakker, C. I. M., Stolyarova, S. & Nemirovsky, Y., 2005, IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005. p. 961-964 4 p.

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Muscle enhancement using closed-loop electrical stimulation: Volitional versus induced torque

      Langzam, E., Isakov, E., Nemirovsky, Y. & Mizrahi, J., 2005, 10th Annual Conference of the International FES Society. 3 p.

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Muscle force augmentation by low-intensity electrical stimulation

      Langzam, E., Isakov, E., Nemirovsky, Y. & Mizrahi, J., 2005, Proceedings of the 2005 27th Annual International Conference of the Engineering in Medicine and Biology Society, IEEE-EMBS 2005. p. 5808-5811 4 p. 1615809. (Annual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings; vol. 7 VOLS).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

    • Vertically integrated silicon single crystalline MEMS switch

      Aharon, O., Feldman, S. & Nemirovsky, Y., 2005, TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. p. 1047-1050 4 p. 2E4.148. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; vol. 1).

      Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review