@inproceedings{deac81b130b04ccd9c73e06494e58e2c,
title = "A micromirror device with post-fabrication re-adjustable pull-in parameters",
abstract = "In prevalent torsion actuators the angular travel range and pull-in instability are set and cannot be changed once the device is fabricated. The current work presents a novel adjustable micromirror device. By using multiple electrodes, the novel design allows continuous and reversible adjustment of the electromechanical response and pull-in instability of a fabricated device. This response adjustment is demonstrated on a torsion micromirror device and it is used for analog adjustment of the stable angular travel range of micromirror. In addition, the inherent properties of the device enable simple duty cycle modulation of the dynamic response that can be used for gray-scale control.",
keywords = "Actuators, Capacitors, Displays, Electrodes, Electrostatics, Micromirrors, Optical attenuators, Telephony, Torque, Voltage",
author = "David Elata and O. Bochobza-Degani and YAEL NEMIROVSKY",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1217056",
language = "אנגלית",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
pages = "1478--1481",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
}