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A novel (SALA) system for crystallization and doping in low-temperature poly-Si thin-film transistors

  • R. Ishihara
  • , A. Glazed
  • , Y. Raab
  • , P. Rusian
  • , M. Dorfan
  • , B. Lavi
  • , I. Leizerson
  • , A. Kishinevsky
  • , Y. Van Aandel
  • , X. Cao
  • , J. W. Metselaar
  • , C. I.M. Beanakker
  • , S. Stolyarova
  • , Y. Nemirovsky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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