TY - GEN
T1 - An efficient adaptive single-mode pull-in extraction algorithm for computer aided design of electrostatic MEMS devices
AU - Elata, David
AU - Bochobza-Degani, Ofir
AU - Nemirovsly, Yael
PY - 2003
Y1 - 2003
N2 - A novel method for extracting the Pull-in parameters of electrostatic MEMS devices is presented. This method is up to 3000 times faster than the prevalent Voltage Iteration method and up to 30 times faster than the recently presented Displacement Iteration scheme. In contrast to prevalent methods, when searching for the Pull-in state, the Adaptive Single Mode (ASM) method does not invest unnecessary computational effort to calculate other equilibrium states. To this end, a single-mode approximation of the actuator deformation is used to rapidly estimate the Pull-in parameters. Unlike common reduced order modeling approaches, increased accuracy is achieved not by additional predetermined approximation modes but rather by repeatedly adapting a single mode to better capture the deformation at the Pull-in state. To illustrate the method the clamped-clamped beam actuator is simulated.
AB - A novel method for extracting the Pull-in parameters of electrostatic MEMS devices is presented. This method is up to 3000 times faster than the prevalent Voltage Iteration method and up to 30 times faster than the recently presented Displacement Iteration scheme. In contrast to prevalent methods, when searching for the Pull-in state, the Adaptive Single Mode (ASM) method does not invest unnecessary computational effort to calculate other equilibrium states. To this end, a single-mode approximation of the actuator deformation is used to rapidly estimate the Pull-in parameters. Unlike common reduced order modeling approaches, increased accuracy is achieved not by additional predetermined approximation modes but rather by repeatedly adapting a single mode to better capture the deformation at the Pull-in state. To illustrate the method the clamped-clamped beam actuator is simulated.
KW - Adaptive Single Mode
KW - Electrostatic actuator
KW - Numerical scheme
KW - Pull-In
UR - https://www.scopus.com/pages/publications/6344261854
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AN - SCOPUS:6344261854
SN - 0972842209
T3 - 2003 Nanotechnology Conference and Trade Show - Nanotech 2003
SP - 464
EP - 467
BT - 2003 Nanotechnology Conference and Trade Show - Nanotech 2003
A2 - Laudon, M.
A2 - Romanowicz, B.
T2 - 2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Y2 - 23 February 2003 through 27 February 2003
ER -