Catalytic Gas Sensor Based on Micro Machined CMOS Transistor

Dima Shlenkevitch; Moshe Avraham; Sara Stolyarova; Tanya Blank; Yael Nemirovsky

doi:10.1109/COMCAS44984.2019.8958440

Catalytic Gas Sensor Based on Micro Machined CMOS Transistor

Dima Shlenkevitch, Moshe Avraham, Sara Stolyarova, Tanya Blank, Yael Nemirovsky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents a miniaturized catalytic gas sensor (Pellistor-like; dubbed GMOS) where the thermal sensor is a micromachined CMOS -SOI transistor upon which nano particles of Pt are printed. The printing technology and equipment as well as the Pt ink suitable for printing on wafer scale, are described. The enhanced performance compared to sputtered Pt thin layer is reported. The GMOS sensor, processed in low cost CMOS-SOI technology, and wafer level processing and packaging promises to become the widely accepted gas sensing approach for mobile applications, including wearables, smart homes as well as smart phones.

Original language	English
Title of host publication	2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019
ISBN (Electronic)	9781538695494
DOIs	https://doi.org/10.1109/COMCAS44984.2019.8958440
State	Published - Nov 2019
Event	2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019 - Tel-Aviv, Israel Duration: 4 Nov 2019 → 6 Nov 2019

Publication series

Name	2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019

Conference

Conference	2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019
Country/Territory	Israel
City	Tel-Aviv
Period	4/11/19 → 6/11/19

Keywords

CMOS-SOI-MEMS
Catalytic Gas sensor
Pt Nanoparticles

ASJC Scopus subject areas

Information Systems and Management
Electrical and Electronic Engineering
Instrumentation
Artificial Intelligence
Computer Networks and Communications

Access to Document

10.1109/COMCAS44984.2019.8958440

Cite this

Shlenkevitch, D., Avraham, M., Stolyarova, S., Blank, T., & Nemirovsky, Y. (2019). Catalytic Gas Sensor Based on Micro Machined CMOS Transistor. In 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019 Article 8958440 (2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019). https://doi.org/10.1109/COMCAS44984.2019.8958440

@inproceedings{a1cb5727cede44f19f697affbb483f4e,

title = "Catalytic Gas Sensor Based on Micro Machined CMOS Transistor",

abstract = "This paper presents a miniaturized catalytic gas sensor (Pellistor-like; dubbed GMOS) where the thermal sensor is a micromachined CMOS -SOI transistor upon which nano particles of Pt are printed. The printing technology and equipment as well as the Pt ink suitable for printing on wafer scale, are described. The enhanced performance compared to sputtered Pt thin layer is reported. The GMOS sensor, processed in low cost CMOS-SOI technology, and wafer level processing and packaging promises to become the widely accepted gas sensing approach for mobile applications, including wearables, smart homes as well as smart phones.",

keywords = "CMOS-SOI-MEMS, Catalytic Gas sensor, Pt Nanoparticles",

author = "Dima Shlenkevitch and Moshe Avraham and Sara Stolyarova and Tanya Blank and Yael Nemirovsky",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019 ; Conference date: 04-11-2019 Through 06-11-2019",

year = "2019",

month = nov,

doi = "10.1109/COMCAS44984.2019.8958440",

language = "אנגלית",

series = "2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019",

booktitle = "2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019",

}

Shlenkevitch, D, Avraham, M, Stolyarova, S, Blank, T & Nemirovsky, Y 2019, Catalytic Gas Sensor Based on Micro Machined CMOS Transistor. in 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019., 8958440, 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019, 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019, Tel-Aviv, Israel, 4/11/19. https://doi.org/10.1109/COMCAS44984.2019.8958440

Catalytic Gas Sensor Based on Micro Machined CMOS Transistor. / Shlenkevitch, Dima; Avraham, Moshe; Stolyarova, Sara et al.
2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019. 2019. 8958440 (2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Catalytic Gas Sensor Based on Micro Machined CMOS Transistor

AU - Shlenkevitch, Dima

AU - Avraham, Moshe

AU - Stolyarova, Sara

AU - Blank, Tanya

AU - Nemirovsky, Yael

PY - 2019/11

Y1 - 2019/11

N2 - This paper presents a miniaturized catalytic gas sensor (Pellistor-like; dubbed GMOS) where the thermal sensor is a micromachined CMOS -SOI transistor upon which nano particles of Pt are printed. The printing technology and equipment as well as the Pt ink suitable for printing on wafer scale, are described. The enhanced performance compared to sputtered Pt thin layer is reported. The GMOS sensor, processed in low cost CMOS-SOI technology, and wafer level processing and packaging promises to become the widely accepted gas sensing approach for mobile applications, including wearables, smart homes as well as smart phones.

AB - This paper presents a miniaturized catalytic gas sensor (Pellistor-like; dubbed GMOS) where the thermal sensor is a micromachined CMOS -SOI transistor upon which nano particles of Pt are printed. The printing technology and equipment as well as the Pt ink suitable for printing on wafer scale, are described. The enhanced performance compared to sputtered Pt thin layer is reported. The GMOS sensor, processed in low cost CMOS-SOI technology, and wafer level processing and packaging promises to become the widely accepted gas sensing approach for mobile applications, including wearables, smart homes as well as smart phones.

KW - CMOS-SOI-MEMS

KW - Catalytic Gas sensor

KW - Pt Nanoparticles

UR - http://www.scopus.com/inward/record.url?scp=85078919366&partnerID=8YFLogxK

U2 - 10.1109/COMCAS44984.2019.8958440

DO - 10.1109/COMCAS44984.2019.8958440

M3 - ???researchoutput.researchoutputtypes.contributiontobookanthology.conference???

AN - SCOPUS:85078919366

T3 - 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019

BT - 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019

T2 - 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019

Y2 - 4 November 2019 through 6 November 2019

ER -

Shlenkevitch D, Avraham M, Stolyarova S, Blank T, Nemirovsky Y. Catalytic Gas Sensor Based on Micro Machined CMOS Transistor. In 2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019. 2019. 8958440. (2019 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2019). doi: 10.1109/COMCAS44984.2019.8958440

Catalytic Gas Sensor Based on Micro Machined CMOS Transistor

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