Comparative study of novel micromachined accelerometers employing MIDOS

O. Bochobza-Degani; D. J. Seter; E. Socher; Y. Nemirovsky

doi:10.1016/S0924-4247(99)00253-8

Comparative study of novel micromachined accelerometers employing MIDOS

O. Bochobza-Degani, D. J. Seter, E. Socher, Y. Nemirovsky

Research output: Contribution to journal › Conference article › peer-review

Abstract

This paper reports on the fabrication and characterization of a novel implementation of micromachined accelerometers. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device is presented. The device consists of a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in detail as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70 (μg/√Hz) to 1 (mg/√Hz) with bandwidth of 1 KHz to 4 KHz.

Original language	English
Pages (from-to)	91-99
Number of pages	9
Journal	Sensors and Actuators, A: Physical
Volume	80
Issue number	2
DOIs	https://doi.org/10.1016/S0924-4247(99)00253-8
State	Published - 10 Mar 2000
Event	12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99) - Orlando, FL, USA Duration: 17 Jan 1999 → 21 Jan 1999

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/S0924-4247(99)00253-8

Cite this

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abstract = "This paper reports on the fabrication and characterization of a novel implementation of micromachined accelerometers. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device is presented. The device consists of a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in detail as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70 (μg/√Hz) to 1 (mg/√Hz) with bandwidth of 1 KHz to 4 KHz.",

author = "O. Bochobza-Degani and Seter, {D. J.} and E. Socher and Y. Nemirovsky",

note = "Funding Information: This research is supported by the Israeli Ministry of Science. The authors would like to acknowledge Mr. Avi Shai and Mr. Yosi Leivovich help in bonding and packaging of the prototypes. ; 12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99) ; Conference date: 17-01-1999 Through 21-01-1999",

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AU - Seter, D. J.

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AU - Nemirovsky, Y.

N1 - Funding Information: This research is supported by the Israeli Ministry of Science. The authors would like to acknowledge Mr. Avi Shai and Mr. Yosi Leivovich help in bonding and packaging of the prototypes.

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N2 - This paper reports on the fabrication and characterization of a novel implementation of micromachined accelerometers. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device is presented. The device consists of a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in detail as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70 (μg/√Hz) to 1 (mg/√Hz) with bandwidth of 1 KHz to 4 KHz.

AB - This paper reports on the fabrication and characterization of a novel implementation of micromachined accelerometers. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device is presented. The device consists of a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in detail as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70 (μg/√Hz) to 1 (mg/√Hz) with bandwidth of 1 KHz to 4 KHz.

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Comparative study of novel micromachined accelerometers employing MIDOS

Abstract

ASJC Scopus subject areas

UN SDGs

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