Comparative study of novel micromachined accelerometers employing MIDOS

Keyphrases

• Optical Sensing 100%
• Noise Equivalent Acceleration 100%
• Micromachined Accelerometer 100%
• Mechanical Components 50%
• Hybrid System 50%
• Fabrication Methods 50%
• Photodetector 50%
• Readout Electronics 50%
• Sensing Technique 50%
• Accelerometer 50%
• Bulk Micromachining 50%
• CMOS chip 50%
• Proof Mass 50%
• Indium Bump 50%
• Output Displacement 50%

Engineering

• Photodetector 100%
• Mechanical Part 100%
• Sensing Mechanisms 100%
• Proof Mass 100%