@inproceedings{149e4abbbc39479aa25f2d1ec97aff5f,
title = "Composite polysilicon-platinum lateral nanoelectromechanical relays",
abstract = "This paper reports the fabrication and performance of laterally actuated, polysilicon-platinum composite nanoelectromechanical (NEM) relays. Laterally actuated relays are defined in a single lithography step, enabling symmetric electrode and beam structures. The platinum coating serves as the conducting contact material and can also provide a local routing layer. Decoupling mechanical and electrical properties of the NEM relay allows independent optimization of each property. The NEM relays exhibited less than 3kΩ contact resistance and can operate for 108 cycles in room ambient.",
author = "R. Parsa and S. Chong and N. Patil and K. Akarvardar and J. Provine and D. Lee and David Elata and S. Mitra and Wong, \{H. S.P.\} and Howe, \{R. T.\}",
note = "Publisher Copyright: {\textcopyright} 2010TRF.; 2010 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 06-06-2010 Through 10-06-2010",
year = "2010",
doi = "10.31438/trf.hh2010.2",
language = "אנגלית",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
pages = "7--10",
editor = "Monk, \{David J.\} and Turner, \{Kimberly L.\}",
booktitle = "2010 Solid-State Sensors, Actuators, and Microsystems Workshop",
}