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Electromechanical sensing of charge retention on floating electrodes

  • David Elata
  • , Vitaly Leus
  • , Arnon Hirshberg
  • , J. Provine
  • , Roger T. Howe

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

It is demonstrated theoretically and experimentally, that charge on floating electrodes can be measured by its effect on the electromechanical response of an electrostatic actuator. Charged, electrostatically-floating electrodes can be used as a DC bias source or for memory storage. Charge on a floating electrode must be measured indirectly because any direct measurement (e.g. measuring the voltage of the floating electrode) would cause discharge.

Original languageEnglish
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages1395-1398
Number of pages4
DOIs
StatePublished - 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: 1 Nov 20104 Nov 2010

Publication series

NameProceedings of IEEE Sensors

Conference

Conference9th IEEE Sensors Conference 2010, SENSORS 2010
Country/TerritoryUnited States
CityWaikoloa, HI
Period1/11/104/11/10

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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