High performance MEMS 0.18μm RF- CMOS inductors

R. Ben Yishay; S. Stolyarova; S. Shapira; Y. Nemirovsky

doi:10.1109/COMCAS.2008.4562816

High performance MEMS 0.18μm RF- CMOS inductors

R. Ben Yishay, S. Stolyarova, S. Shapira, Y. Nemirovsky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This work presents the fabrication and characterization of on-chip micromachined spiral inductors in a commercially available 0.18μm CMOS process provided by TOWER Semiconductors Ltd. It explores the possibility to reduce parasitic effects and extending high frequency performance by applying a maskless micromachining post processing to create fully integrated inductors, suspended over the substrate with inter-turn dielectric removed.

Original language	English
Title of host publication	2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008
DOIs	https://doi.org/10.1109/COMCAS.2008.4562816
State	Published - 2008
Event	2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008 - Tel-Aviv, Israel Duration: 13 May 2008 → 14 May 2008

Publication series

Name	2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008

Conference

Conference	2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008
Country/Territory	Israel
City	Tel-Aviv
Period	13/05/08 → 14/05/08

ASJC Scopus subject areas

Computer Networks and Communications
Control and Systems Engineering
Electrical and Electronic Engineering
Communication

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10.1109/COMCAS.2008.4562816

Cite this

Yishay, R. B., Stolyarova, S., Shapira, S., & Nemirovsky, Y. (2008). High performance MEMS 0.18μm RF- CMOS inductors. In 2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008 Article 4562816 (2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008). https://doi.org/10.1109/COMCAS.2008.4562816

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title = "High performance MEMS 0.18μm RF- CMOS inductors",

abstract = "This work presents the fabrication and characterization of on-chip micromachined spiral inductors in a commercially available 0.18μm CMOS process provided by TOWER Semiconductors Ltd. It explores the possibility to reduce parasitic effects and extending high frequency performance by applying a maskless micromachining post processing to create fully integrated inductors, suspended over the substrate with inter-turn dielectric removed.",

author = "Yishay, {R. Ben} and S. Stolyarova and S. Shapira and Y. Nemirovsky",

year = "2008",

doi = "10.1109/COMCAS.2008.4562816",

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booktitle = "2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008",

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Yishay, RB, Stolyarova, S, Shapira, S & Nemirovsky, Y 2008, High performance MEMS 0.18μm RF- CMOS inductors. in 2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008., 4562816, 2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008, 2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008, Tel-Aviv, Israel, 13/05/08. https://doi.org/10.1109/COMCAS.2008.4562816

High performance MEMS 0.18μm RF- CMOS inductors. / Yishay, R. Ben; Stolyarova, S.; Shapira, S. et al.
2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008. 2008. 4562816 (2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Yishay RB, Stolyarova S, Shapira S, Nemirovsky Y. High performance MEMS 0.18μm RF- CMOS inductors. In 2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008. 2008. 4562816. (2008 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems, COMCAS 2008). doi: 10.1109/COMCAS.2008.4562816

High performance MEMS 0.18μm RF- CMOS inductors

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