High performance MEMS 0.18μm RF-CMOS transformers

Shlomo Katz; Igor Brouk; Sara Stolyarova; Shye Shapira; Yael Nemirovsky

doi:10.1109/COMCAS.2009.5386016

High performance MEMS 0.18μm RF-CMOS transformers

Shlomo Katz
, Igor Brouk
, Sara Stolyarova
, Shye Shapira
, Yael Nemirovsky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This work presents a micromachined RF-CMOS transformer fabricated in a commercially available 0.18μm CMOS process. Maskless micromachining post-processing is used to remove oxide and substrate material from around the transformer, reducing parasitic effects and improving the performance of the transformer.

Original language	English
Title of host publication	2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009
DOIs	https://doi.org/10.1109/COMCAS.2009.5386016
State	Published - 2009
Event	2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009 - Tel Aviv, Israel Duration: 9 Nov 2009 → 11 Nov 2009

Publication series

Name	2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009

Conference

Conference	2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009
Country/Territory	Israel
City	Tel Aviv
Period	9/11/09 → 11/11/09

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Baluns
CMOS integrated circuits
MEMS
Maskless micromachining
Q enhancement
RF-CMOS transformers
Radio frequency integrated circuits

ASJC Scopus subject areas

Computational Theory and Mathematics
Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/COMCAS.2009.5386016

Cite this

Katz, S., Brouk, I., Stolyarova, S., Shapira, S., & Nemirovsky, Y. (2009). High performance MEMS 0.18μm RF-CMOS transformers. In 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009 Article 5386016 (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009). https://doi.org/10.1109/COMCAS.2009.5386016

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title = "High performance MEMS 0.18μm RF-CMOS transformers",

abstract = "This work presents a micromachined RF-CMOS transformer fabricated in a commercially available 0.18μm CMOS process. Maskless micromachining post-processing is used to remove oxide and substrate material from around the transformer, reducing parasitic effects and improving the performance of the transformer.",

keywords = "Baluns, CMOS integrated circuits, MEMS, Maskless micromachining, Q enhancement, RF-CMOS transformers, Radio frequency integrated circuits",

author = "Shlomo Katz and Igor Brouk and Sara Stolyarova and Shye Shapira and Yael Nemirovsky",

year = "2009",

doi = "10.1109/COMCAS.2009.5386016",

language = "אנגלית",

isbn = "9781424439850",

series = "2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009",

booktitle = "2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009",

note = "2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009 ; Conference date: 09-11-2009 Through 11-11-2009",

}

Katz, S, Brouk, I, Stolyarova, S, Shapira, S & Nemirovsky, Y 2009, High performance MEMS 0.18μm RF-CMOS transformers. in 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009., 5386016, 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009, 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009, Tel Aviv, Israel, 9/11/09. https://doi.org/10.1109/COMCAS.2009.5386016

High performance MEMS 0.18μm RF-CMOS transformers. / Katz, Shlomo; Brouk, Igor; Stolyarova, Sara et al.
2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009. 2009. 5386016 (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - High performance MEMS 0.18μm RF-CMOS transformers

AU - Katz, Shlomo

AU - Brouk, Igor

AU - Stolyarova, Sara

AU - Shapira, Shye

AU - Nemirovsky, Yael

PY - 2009

Y1 - 2009

N2 - This work presents a micromachined RF-CMOS transformer fabricated in a commercially available 0.18μm CMOS process. Maskless micromachining post-processing is used to remove oxide and substrate material from around the transformer, reducing parasitic effects and improving the performance of the transformer.

AB - This work presents a micromachined RF-CMOS transformer fabricated in a commercially available 0.18μm CMOS process. Maskless micromachining post-processing is used to remove oxide and substrate material from around the transformer, reducing parasitic effects and improving the performance of the transformer.

KW - Baluns

KW - CMOS integrated circuits

KW - MEMS

KW - Maskless micromachining

KW - Q enhancement

KW - RF-CMOS transformers

KW - Radio frequency integrated circuits

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U2 - 10.1109/COMCAS.2009.5386016

DO - 10.1109/COMCAS.2009.5386016

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AN - SCOPUS:77949794145

SN - 9781424439850

T3 - 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009

BT - 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009

T2 - 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009

Y2 - 9 November 2009 through 11 November 2009

ER -

Katz S, Brouk I, Stolyarova S, Shapira S, Nemirovsky Y. High performance MEMS 0.18μm RF-CMOS transformers. In 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009. 2009. 5386016. (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009). doi: 10.1109/COMCAS.2009.5386016

High performance MEMS 0.18μm RF-CMOS transformers

Abstract

Publication series

Conference

UN SDGs

Keywords

ASJC Scopus subject areas

Access to Document

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