@inproceedings{27f4a85d8e464a3198ecc7b7ba64f7ed,
title = "High-stability numerical algorithm for the simulation of deformable electrostatic MEMS devices",
abstract = "This paper presents a novel high-stability electrically-driven algorithm for the simulation of the electro-mechanical actuation of electrostatic MEMS devices. The stability of this algorithm improves on that of voltage- and charge-drive algorithms. Key in our algorithm are the use of a local charge density as driver for an adapted relaxation algorithm and the adequate selection of the bias node in the mesh. The high stability of this algorithm allows probing the electromechanical equilibrium locus way beyond the V-and Q-drive pull-in instabilities. The new algorithm allows investigating the effect of dielectric charging in deformable electrostatic MEMS devices and especially the narrowing of their equilibrium locus due to dielectric charging non-uniformities. We implement this algorithm in 2D for clamped-clamped beams of rectangular cross-section and take into account, among other things, distributed dielectric thickness, permittivity, rest air gap, actuation electrode and linearly distributed dielectric roughness.",
keywords = "Dielectric charging, Electrostatic actuation, High stability, Numerical algorithm",
author = "X. Rottenberg and B. Nauwelaers and \{De Raedt\}, W. and D. Elata",
year = "2008",
language = "אנגלית",
isbn = "9781420085075",
series = "Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008",
pages = "501--504",
booktitle = "Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008",
note = "2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008 ; Conference date: 01-06-2008 Through 05-06-2008",
}