High tuning range MEMS capacitor for microwave applications

E. David; T. Zlotnikov; L. Gal; O. Lavie; Y. Nemirovsky

doi:10.1109/COMCAS.2009.5386051

High tuning range MEMS capacitor for microwave applications

E. David, T. Zlotnikov, L. Gal, O. Lavie, Y. Nemirovsky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents a novel MEMS comb-structured variable capacitor at 20GHz that features a wide capacitance tuning range of 200%, yet avoids unwanted coupling through the springs. This new varactor consists of three comb structures - two of which are anchored to the substrate, while the third, which capacitively couples the two anchored ones, is movable, suspended on mechanical springs. This new design decouples the mechanical mechanism from the RF capacitor and allows an independent optimal design of the two.

Original language	English
Title of host publication	2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009
DOIs	https://doi.org/10.1109/COMCAS.2009.5386051
State	Published - 2009
Event	2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009 - Tel Aviv, Israel Duration: 9 Nov 2009 → 11 Nov 2009

Publication series

Name	2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009

Conference

Conference	2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009
Country/Territory	Israel
City	Tel Aviv
Period	9/11/09 → 11/11/09

Keywords

Capacitors
Microelectromechanical devices
Micromachining
Q factor
Varactor

ASJC Scopus subject areas

Computational Theory and Mathematics
Hardware and Architecture
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/COMCAS.2009.5386051

Cite this

David, E., Zlotnikov, T., Gal, L., Lavie, O., & Nemirovsky, Y. (2009). High tuning range MEMS capacitor for microwave applications. In 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009 Article 5386051 (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009). https://doi.org/10.1109/COMCAS.2009.5386051

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title = "High tuning range MEMS capacitor for microwave applications",

abstract = "This paper presents a novel MEMS comb-structured variable capacitor at 20GHz that features a wide capacitance tuning range of 200%, yet avoids unwanted coupling through the springs. This new varactor consists of three comb structures - two of which are anchored to the substrate, while the third, which capacitively couples the two anchored ones, is movable, suspended on mechanical springs. This new design decouples the mechanical mechanism from the RF capacitor and allows an independent optimal design of the two.",

keywords = "Capacitors, Microelectromechanical devices, Micromachining, Q factor, Varactor",

author = "E. David and T. Zlotnikov and L. Gal and O. Lavie and Y. Nemirovsky",

year = "2009",

doi = "10.1109/COMCAS.2009.5386051",

language = "אנגלית",

isbn = "9781424439850",

series = "2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009",

booktitle = "2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009",

note = "2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009 ; Conference date: 09-11-2009 Through 11-11-2009",

}

David, E, Zlotnikov, T, Gal, L, Lavie, O & Nemirovsky, Y 2009, High tuning range MEMS capacitor for microwave applications. in 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009., 5386051, 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009, 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009, Tel Aviv, Israel, 9/11/09. https://doi.org/10.1109/COMCAS.2009.5386051

High tuning range MEMS capacitor for microwave applications. / David, E.; Zlotnikov, T.; Gal, L. et al.
2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009. 2009. 5386051 (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Gal, L.

AU - Lavie, O.

AU - Nemirovsky, Y.

PY - 2009

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N2 - This paper presents a novel MEMS comb-structured variable capacitor at 20GHz that features a wide capacitance tuning range of 200%, yet avoids unwanted coupling through the springs. This new varactor consists of three comb structures - two of which are anchored to the substrate, while the third, which capacitively couples the two anchored ones, is movable, suspended on mechanical springs. This new design decouples the mechanical mechanism from the RF capacitor and allows an independent optimal design of the two.

AB - This paper presents a novel MEMS comb-structured variable capacitor at 20GHz that features a wide capacitance tuning range of 200%, yet avoids unwanted coupling through the springs. This new varactor consists of three comb structures - two of which are anchored to the substrate, while the third, which capacitively couples the two anchored ones, is movable, suspended on mechanical springs. This new design decouples the mechanical mechanism from the RF capacitor and allows an independent optimal design of the two.

KW - Capacitors

KW - Microelectromechanical devices

KW - Micromachining

KW - Q factor

KW - Varactor

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BT - 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009

T2 - 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009

Y2 - 9 November 2009 through 11 November 2009

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David E, Zlotnikov T, Gal L, Lavie O, Nemirovsky Y. High tuning range MEMS capacitor for microwave applications. In 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009. 2009. 5386051. (2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems, COMCAS 2009). doi: 10.1109/COMCAS.2009.5386051

High tuning range MEMS capacitor for microwave applications

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

UN SDGs

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