Measuring charge and charge decay in floating-electrode electrostatic actuators

David Elata; R. Hennessy; V. Leus; N. Klejwa; A. Hirshberg; J. Provine; R. T. Howe

doi:10.31438/trf.hh2008.48

Measuring charge and charge decay in floating-electrode electrostatic actuators

David Elata
, R. Hennessy
, V. Leus
, N. Klejwa
, A. Hirshberg
, J. Provine
, R. T. Howe

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We consider electrostatic actuators that are pre-energized with charge, which amplifies their response to input voltages. Floating-electrode actuators were designed, fabricated, and characterized. A non-disruptive measurement of charge is proposed and demonstrated. When the floating electrode is charged, the system has two distinct pull-in voltages. It is shown that the amplitude of charge is proportional to the average of the two pull-in voltages. In this work, we present the correct way of using energy methods to analyze systems that are loaded by both charge and voltage.

Original language	English
Title of host publication	2008 Solid-State Sensors, Actuators, and Microsystems Workshop
Editors	Kimberly L. Turner, Leland Spangler
Pages	178-181
Number of pages	4
ISBN (Electronic)	0964002477, 9780964002470
DOIs	https://doi.org/10.31438/trf.hh2008.48
State	Published - 2008
Event	2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States Duration: 1 Jun 2008 → 5 Jun 2008

Publication series

Name	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference	2008 Solid-State Sensors, Actuators, and Microsystems Workshop
Country/Territory	United States
City	Hilton Head Island
Period	1/06/08 → 5/06/08

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering
Hardware and Architecture

Access to Document

10.31438/trf.hh2008.48

Cite this

Elata, D., Hennessy, R., Leus, V., Klejwa, N., Hirshberg, A., Provine, J., & Howe, R. T. (2008). Measuring charge and charge decay in floating-electrode electrostatic actuators. In K. L. Turner, & L. Spangler (Eds.), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 178-181). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). https://doi.org/10.31438/trf.hh2008.48

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title = "Measuring charge and charge decay in floating-electrode electrostatic actuators",

abstract = "We consider electrostatic actuators that are pre-energized with charge, which amplifies their response to input voltages. Floating-electrode actuators were designed, fabricated, and characterized. A non-disruptive measurement of charge is proposed and demonstrated. When the floating electrode is charged, the system has two distinct pull-in voltages. It is shown that the amplitude of charge is proportional to the average of the two pull-in voltages. In this work, we present the correct way of using energy methods to analyze systems that are loaded by both charge and voltage.",

author = "David Elata and R. Hennessy and V. Leus and N. Klejwa and A. Hirshberg and J. Provine and Howe, \{R. T.\}",

note = "Publisher Copyright: {\textcopyright} 2008 TRF.; 2008 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 01-06-2008 Through 05-06-2008",

year = "2008",

doi = "10.31438/trf.hh2008.48",

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Elata, D, Hennessy, R, Leus, V, Klejwa, N, Hirshberg, A, Provine, J & Howe, RT 2008, Measuring charge and charge decay in floating-electrode electrostatic actuators. in KL Turner & L Spangler (eds), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, pp. 178-181, 2008 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, United States, 1/06/08. https://doi.org/10.31438/trf.hh2008.48

Measuring charge and charge decay in floating-electrode electrostatic actuators. / Elata, David; Hennessy, R.; Leus, V. et al.
2008 Solid-State Sensors, Actuators, and Microsystems Workshop. ed. / Kimberly L. Turner; Leland Spangler. 2008. p. 178-181 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Provine, J.

AU - Howe, R. T.

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AB - We consider electrostatic actuators that are pre-energized with charge, which amplifies their response to input voltages. Floating-electrode actuators were designed, fabricated, and characterized. A non-disruptive measurement of charge is proposed and demonstrated. When the floating electrode is charged, the system has two distinct pull-in voltages. It is shown that the amplitude of charge is proportional to the average of the two pull-in voltages. In this work, we present the correct way of using energy methods to analyze systems that are loaded by both charge and voltage.

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Elata D, Hennessy R, Leus V, Klejwa N, Hirshberg A, Provine J et al. Measuring charge and charge decay in floating-electrode electrostatic actuators. In Turner KL, Spangler L, editors, 2008 Solid-State Sensors, Actuators, and Microsystems Workshop. 2008. p. 178-181. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). doi: 10.31438/trf.hh2008.48

Measuring charge and charge decay in floating-electrode electrostatic actuators

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