MEMS composite porous silicon/polysilicon cantilever sensor for enhanced triglycerides biosensing

R. E. Fernandez; A. Chadha; E. Bhattacharya; S. Stolyarova; Y. Nemirovsky

doi:10.1109/ICSENS.2008.4716722

MEMS composite porous silicon/polysilicon cantilever sensor for enhanced triglycerides biosensing

R. E. Fernandez, A. Chadha, E. Bhattacharya, S. Stolyarova, Y. Nemirovsky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A novel composite porous silicon/polysilicon microcantilever for biosensing applications with enhanced sensitivity is reported. It is fabricated by surface mi cromachining of polysilicon cantilevers followed by the formation of the surface porous layer after release by Reaction Induced Vapor Phase Stain Etch. The microcantilevers with porous surface layer are characterized by their morphology that exhibits a dual macro and nanostructure for very effective immobilization of biomolecules. The current work focuses on the fabrication of composite porous silicon/polysilicon microcantilevers, characterization of their morphology and demonstration of improved immobilization of enzymes resulting in enhanced sensing of triglycerides.

Original language	English
Title of host publication	2008 IEEE Sensors, SENSORS 2008
Pages	1468-1471
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2008.4716722
State	Published - 2008
Event	2008 IEEE Sensors, SENSORS 2008 - Lecce, Italy Duration: 26 Oct 2008 → 29 Oct 2009

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	2008 IEEE Sensors, SENSORS 2008
Country/Territory	Italy
City	Lecce
Period	26/10/08 → 29/10/09

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1109/ICSENS.2008.4716722

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title = "MEMS composite porous silicon/polysilicon cantilever sensor for enhanced triglycerides biosensing",

abstract = "A novel composite porous silicon/polysilicon microcantilever for biosensing applications with enhanced sensitivity is reported. It is fabricated by surface mi cromachining of polysilicon cantilevers followed by the formation of the surface porous layer after release by Reaction Induced Vapor Phase Stain Etch. The microcantilevers with porous surface layer are characterized by their morphology that exhibits a dual macro and nanostructure for very effective immobilization of biomolecules. The current work focuses on the fabrication of composite porous silicon/polysilicon microcantilevers, characterization of their morphology and demonstration of improved immobilization of enzymes resulting in enhanced sensing of triglycerides.",

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AU - Stolyarova, S.

AU - Nemirovsky, Y.

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AB - A novel composite porous silicon/polysilicon microcantilever for biosensing applications with enhanced sensitivity is reported. It is fabricated by surface mi cromachining of polysilicon cantilevers followed by the formation of the surface porous layer after release by Reaction Induced Vapor Phase Stain Etch. The microcantilevers with porous surface layer are characterized by their morphology that exhibits a dual macro and nanostructure for very effective immobilization of biomolecules. The current work focuses on the fabrication of composite porous silicon/polysilicon microcantilevers, characterization of their morphology and demonstration of improved immobilization of enzymes resulting in enhanced sensing of triglycerides.

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MEMS composite porous silicon/polysilicon cantilever sensor for enhanced triglycerides biosensing

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