MEMS Composite Porous Silicon/Polysilicon Cantilevers for Biosensing Applications

Sara Stoliarov, R. E. Fernandez, A. Chadha, E. Bhattacharya, Yael Nemirovsky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs
State	Published - 2007
Event	3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs - Athens, Greece Duration: 18 Nov 2007 → 21 Nov 2007 Conference number: 3rd http://imel.demokritos.gr/micro-nano/conf2007/index.html

Conference	3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs
Country/Territory	Greece
City	Athens
Period	18/11/07 → 21/11/07
Internet address	http://imel.demokritos.gr/micro-nano/conf2007/index.html

Access to Document

@inproceedings{fe946d7917194695b2965cd6949a7c7e,

title = "MEMS Composite Porous Silicon/Polysilicon Cantilevers for Biosensing Applications",

author = "Sara Stoliarov and Fernandez, {R. E.} and A. Chadha and E. Bhattacharya and Yael Nemirovsky",

year = "2007",

language = "אנגלית",

booktitle = "3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs",

note = "3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs ; Conference date: 18-11-2007 Through 21-11-2007",

url = "http://imel.demokritos.gr/micro-nano/conf2007/index.html",

}

Stoliarov, S, Fernandez, RE, Chadha, A, Bhattacharya, E & Nemirovsky, Y 2007, MEMS Composite Porous Silicon/Polysilicon Cantilevers for Biosensing Applications. in 3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs. 3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs, Athens, Greece, 18/11/07. <http://imel.demokritos.gr/micro-nano/conf2007/docs/abstract_book.pdf#page=25>

TY - GEN

T1 - MEMS Composite Porous Silicon/Polysilicon Cantilevers for Biosensing Applications

AU - Stoliarov, Sara

AU - Fernandez, R. E.

AU - Chadha, A.

AU - Bhattacharya, E.

AU - Nemirovsky, Yael

N1 - Conference code: 3rd

PY - 2007

Y1 - 2007

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BT - 3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs

T2 - 3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs

Y2 - 18 November 2007 through 21 November 2007

ER -