METHOD FOR PRODUCTION OF LIXSIYOZ COATINGS USING A SINGLE SOURCE FOR LI AND SI AND RESULTANT COATED PRODUCTS

Malakhi Noked (Inventor), Yitzhak Apeloig (Inventor), Yosi Kratish (Inventor), Dmitry Bravo-Zhivotovskii (Inventor), Rosy Sharma (Inventor)

Research output: Patent

Abstract

Some exemplary embodiments of the invention relate to performing atomic layer deposition (ALD) or molecular layer deposition (MLD) of a volatile organo silyl lithium compound and ozone on a substrate. According to various exemplary embodiments of the invention the volatile organo silyl lithium compound includes SiLi2tBuMe and/or tBuMe2SiLi and/or tBuMe2SiNa and/or SiLi3Et and/or Alk3GeLi and/or [(Alk3Si)4AI]Li and/or (NMe2)(tBu)2SiLi and/or tBuMe2SiLi-TMEDA and/or SiLi + TMA2tBuMe. Resultant coated products and their uses are also disclosed.

Original languageAmerican English
Patent numberWO2021156867
IPCH01M 10/ 0525 A I
Priority date6/02/20
StatePublished - 12 Aug 2021

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