Micro-machined CMOS-SOI transistor (TMOS) thermal sensor operating in air

A. Zviagintsev; T. Blank; I. Brouk; S. Bar-Lev; S. Stolyarova; A. Svetlitza; I. Bloom; A. Nemirovsky; Y. Nemirovsky

doi:10.1109/COMCAS.2017.8244810

Micro-machined CMOS-SOI transistor (TMOS) thermal sensor operating in air

A. Zviagintsev, T. Blank, I. Brouk, S. Bar-Lev, S. Stolyarova, A. Svetlitza, I. Bloom, A. Nemirovsky, Y. Nemirovsky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents the performance of CMOS-SOI TMOS thermal sensor processed in a well-established 1μm technology, operating in air. The TMOS is a micro-machined CMOS transistor, operating at subthreshold. The thermally isolated floating MOS transistor senses temperature changes induced by either a physical or a chemical phenomenon. The change in temperature modifies the threshold voltage and accordingly the I-V characteristics of the micro-machined transistor. Operation in air, without vacuum packaging, enables low-cost products for a wide range of low-cost commercial mobile applications such as IoT, wearables, smart homes and smartphones.

Original language	English
Title of host publication	2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017
Pages	1-4
Number of pages	4
ISBN (Electronic)	9781538631690
DOIs	https://doi.org/10.1109/COMCAS.2017.8244810
State	Published - 28 Jun 2017
Event	2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017 - Tel-Aviv, Israel Duration: 13 Nov 2017 → 15 Nov 2017

Publication series

Name	2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017
Volume	2017-November

Conference

Conference	2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017
Country/Territory	Israel
City	Tel-Aviv
Period	13/11/17 → 15/11/17

Keywords

CMOS-SOI-NEMS technology
IoT applications
MEMS
TMOS imager
Uncooled IR sensing
in-air operation

ASJC Scopus subject areas

Radiation
Computer Networks and Communications
Electrical and Electronic Engineering

Access to Document

10.1109/COMCAS.2017.8244810

Cite this

Zviagintsev, A., Blank, T., Brouk, I., Bar-Lev, S., Stolyarova, S., Svetlitza, A., Bloom, I., Nemirovsky, A., & Nemirovsky, Y. (2017). Micro-machined CMOS-SOI transistor (TMOS) thermal sensor operating in air. In 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017 (pp. 1-4). (2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017; Vol. 2017-November). https://doi.org/10.1109/COMCAS.2017.8244810

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title = "Micro-machined CMOS-SOI transistor (TMOS) thermal sensor operating in air",

abstract = "This paper presents the performance of CMOS-SOI TMOS thermal sensor processed in a well-established 1μm technology, operating in air. The TMOS is a micro-machined CMOS transistor, operating at subthreshold. The thermally isolated floating MOS transistor senses temperature changes induced by either a physical or a chemical phenomenon. The change in temperature modifies the threshold voltage and accordingly the I-V characteristics of the micro-machined transistor. Operation in air, without vacuum packaging, enables low-cost products for a wide range of low-cost commercial mobile applications such as IoT, wearables, smart homes and smartphones.",

keywords = "CMOS-SOI-NEMS technology, IoT applications, MEMS, TMOS imager, Uncooled IR sensing, in-air operation",

author = "A. Zviagintsev and T. Blank and I. Brouk and S. Bar-Lev and S. Stolyarova and A. Svetlitza and I. Bloom and A. Nemirovsky and Y. Nemirovsky",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017 ; Conference date: 13-11-2017 Through 15-11-2017",

year = "2017",

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language = "אנגלית",

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Zviagintsev, A, Blank, T, Brouk, I, Bar-Lev, S, Stolyarova, S, Svetlitza, A, Bloom, I, Nemirovsky, A & Nemirovsky, Y 2017, Micro-machined CMOS-SOI transistor (TMOS) thermal sensor operating in air. in 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017. 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017, vol. 2017-November, pp. 1-4, 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017, Tel-Aviv, Israel, 13/11/17. https://doi.org/10.1109/COMCAS.2017.8244810

Micro-machined CMOS-SOI transistor (TMOS) thermal sensor operating in air. / Zviagintsev, A.; Blank, T.; Brouk, I. et al.
2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017. 2017. p. 1-4 (2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017; Vol. 2017-November).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Svetlitza, A.

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AB - This paper presents the performance of CMOS-SOI TMOS thermal sensor processed in a well-established 1μm technology, operating in air. The TMOS is a micro-machined CMOS transistor, operating at subthreshold. The thermally isolated floating MOS transistor senses temperature changes induced by either a physical or a chemical phenomenon. The change in temperature modifies the threshold voltage and accordingly the I-V characteristics of the micro-machined transistor. Operation in air, without vacuum packaging, enables low-cost products for a wide range of low-cost commercial mobile applications such as IoT, wearables, smart homes and smartphones.

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Zviagintsev A, Blank T, Brouk I, Bar-Lev S, Stolyarova S, Svetlitza A et al. Micro-machined CMOS-SOI transistor (TMOS) thermal sensor operating in air. In 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017. 2017. p. 1-4. (2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems, COMCAS 2017). doi: 10.1109/COMCAS.2017.8244810

Micro-machined CMOS-SOI transistor (TMOS) thermal sensor operating in air

Abstract

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Keywords

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