Modeling, design, and fabrication of uncooled IR CMOS compatible thermoelectric sensors

Keyphrases

• CMOS Technology 100%
• Standard CMOS Technology 100%
• Model Design 100%
• Uncooled 100%
• Thermoelectric Sensor 100%
• Single Element 50%
• Readout Electronics 50%
• Thermocouple 50%
• Thermal Modeling 50%
• Single Array 50%
• Micromachining Technique 50%
• CMOS chip 50%
• Mask-free 50%
• CMOS Readout 50%
• Mechanical Resonant Frequency 50%
• High Thermal Resistance 50%

Engineering

• Limitations 100%
• Single Element 100%
• Micro Machining 100%
• Resonant Frequency 100%
• Thermoelectrics 100%
• Thermal Resistance 100%
• Thermocouple 100%

Material Science

• Thermoelectrics 100%
• Micromachining 100%
• Heat Resistance 100%