Modeling of CMOS-SOI-MEMS Thermal Antenna for Monolithic Passive Uncooled THz Imagers

Alexander Svetlitza; Tanya Blank; Sara Stolyarova; Igor Brouk; Sharon Bar-Lev; Yael Nemirovsky

doi:10.1109/LPT.2015.2513013

Modeling of CMOS-SOI-MEMS Thermal Antenna for Monolithic Passive Uncooled THz Imagers

Alexander Svetlitza, Tanya Blank, Sara Stolyarova, Igor Brouk, Sharon Bar-Lev, Yael Nemirovsky

Research output: Contribution to journal › Article › peer-review

Abstract

We present electromagnetic, thermal, electrical, and mechanical modeling and simulations of uncooled passive THz imaging sensor based on a thermal antenna. The 2-D CMOS-SOI-MEMS imager pixel array constitutes a frequency selective surface tuned to the desired wavelength band. The modeling predicts enhanced performance of the symmetric design in terms of electromagnetic absorption, mechanical planarity, thermal response, and electrical signal.

Original language	English
Article number	7368112
Pages (from-to)	585-588
Number of pages	4
Journal	IEEE Photonics Technology Letters
Volume	28
Issue number	5
DOIs	https://doi.org/10.1109/LPT.2015.2513013
State	Published - 1 Mar 2016

Keywords

MEMS
THz sensors
absorber
frequency selective surfaces (FSS)
thermal antenna
thermal sensors

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1109/LPT.2015.2513013

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abstract = "We present electromagnetic, thermal, electrical, and mechanical modeling and simulations of uncooled passive THz imaging sensor based on a thermal antenna. The 2-D CMOS-SOI-MEMS imager pixel array constitutes a frequency selective surface tuned to the desired wavelength band. The modeling predicts enhanced performance of the symmetric design in terms of electromagnetic absorption, mechanical planarity, thermal response, and electrical signal.",

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AU - Brouk, Igor

AU - Bar-Lev, Sharon

AU - Nemirovsky, Yael

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AB - We present electromagnetic, thermal, electrical, and mechanical modeling and simulations of uncooled passive THz imaging sensor based on a thermal antenna. The 2-D CMOS-SOI-MEMS imager pixel array constitutes a frequency selective surface tuned to the desired wavelength band. The modeling predicts enhanced performance of the symmetric design in terms of electromagnetic absorption, mechanical planarity, thermal response, and electrical signal.

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KW - THz sensors

KW - absorber

KW - frequency selective surfaces (FSS)

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Modeling of CMOS-SOI-MEMS Thermal Antenna for Monolithic Passive Uncooled THz Imagers

Abstract

Keywords

ASJC Scopus subject areas

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