TY - JOUR
T1 - Modeling the pull-in parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model
AU - Bochobza-Degani, Ofir
AU - Nemirovsky, Yael
N1 - Funding Information:
In the past she received the award as a “best teacher” at Technion, a national award of high esteem—“The Award for the Security of Israel” and a Technion award for “Novel Applied Research”. She has received The Kidron Foundation award for “Innovative Applied Research” (a $100,000 grant for research program). She is a distinguished Lecturer of the electron device society of IEEE.
PY - 2002/4/1
Y1 - 2002/4/1
N2 - This paper reports a new approach for the direct calculations of the pull-in parameters of electrostatic actuators using a lumped two degrees of freedom (L2DOF) pull-in model. This model benefits from higher accuracy than the lumped single degree of freedom (L1DOF) models. Moreover, it requires much shorter calculation time compared to either finite-differences simulations or the coupled-domain finite-elements (FEM)/boundary-elements (BEM) simulations. Therefore, this model provides a fast and accurate tool for design optimization of micromachined devices with two-coupled DOF that employ the pull-in phenomenon. In order to confirm the model results, several case studies are compared with either finite-differences simulations or coupled-domains FEM/BEM simulations provided by MEMCAD4.8™, showing an excellent agreement.
AB - This paper reports a new approach for the direct calculations of the pull-in parameters of electrostatic actuators using a lumped two degrees of freedom (L2DOF) pull-in model. This model benefits from higher accuracy than the lumped single degree of freedom (L1DOF) models. Moreover, it requires much shorter calculation time compared to either finite-differences simulations or the coupled-domain finite-elements (FEM)/boundary-elements (BEM) simulations. Therefore, this model provides a fast and accurate tool for design optimization of micromachined devices with two-coupled DOF that employ the pull-in phenomenon. In order to confirm the model results, several case studies are compared with either finite-differences simulations or coupled-domains FEM/BEM simulations provided by MEMCAD4.8™, showing an excellent agreement.
KW - Actuator
KW - Electrostatic
KW - L2DOF
KW - Model
KW - Pull-in
UR - http://www.scopus.com/inward/record.url?scp=0036544219&partnerID=8YFLogxK
U2 - 10.1016/S0924-4247(01)00855-X
DO - 10.1016/S0924-4247(01)00855-X
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AN - SCOPUS:0036544219
SN - 0924-4247
VL - 97-98
SP - 569
EP - 578
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
T2 - Transducers'01 Eurosensors XV
Y2 - 10 June 2001 through 14 June 2001
ER -