TY - JOUR
T1 - Non-Imaging Digital CMOS-SOI-MEMS Uncooled Passive Infra-Red Sensing Systems
AU - Blank, Tanya
AU - Brouk, Igor
AU - Bar-Lev, Sharon
AU - Amar, Gavriel
AU - Meimoun, Elie
AU - Bouscher, Shlomi
AU - Meltsin, Maxim
AU - Vaiana, Michele
AU - Maierna, Amedeo
AU - Castagna, Maria Eloisa
AU - Bruno, Giuseppe
AU - Nemirovsky, Yael
N1 - Publisher Copyright:
© 2001-2012 IEEE.
PY - 2021/2/1
Y1 - 2021/2/1
N2 - This paper presents a novel non-imaging digital passive Infra-Red (PIR) sensing system using a CMOS-SOI-MEMS transistor as the thermal sensor, which replaces the traditional pyroelectric sensors and outperforms thermopiles. The mosaic sensors, which are manufactured by nano-fabrication methods in standard FABs, exhibit enhanced performance and robust manufacturing on wafer level processing and vacuum packaging. Mirror optics instead of Fresnel plastic lenses provides enhanced performance at low-cost. The essential aspects of the design of the mirrors for curtain sensors and presence sensors are presented. The overall measured performance for detecting human targets at extended ranges and hot spots detection are reported. The overall performance of the sensing systems indicate why they are most suitable for consumer electronics, including smart homes, wearables, Internet of Things (IoT) and mobile applications.
AB - This paper presents a novel non-imaging digital passive Infra-Red (PIR) sensing system using a CMOS-SOI-MEMS transistor as the thermal sensor, which replaces the traditional pyroelectric sensors and outperforms thermopiles. The mosaic sensors, which are manufactured by nano-fabrication methods in standard FABs, exhibit enhanced performance and robust manufacturing on wafer level processing and vacuum packaging. Mirror optics instead of Fresnel plastic lenses provides enhanced performance at low-cost. The essential aspects of the design of the mirrors for curtain sensors and presence sensors are presented. The overall measured performance for detecting human targets at extended ranges and hot spots detection are reported. The overall performance of the sensing systems indicate why they are most suitable for consumer electronics, including smart homes, wearables, Internet of Things (IoT) and mobile applications.
KW - CMOS-SOI-MEMS
KW - MOS transistors
KW - infrared (IR) mirror optics
KW - mosaic sensor
KW - passive infrared (PIR) sensors
KW - uncooled infrared (IR) sensors
UR - http://www.scopus.com/inward/record.url?scp=85098777862&partnerID=8YFLogxK
U2 - 10.1109/JSEN.2020.3022095
DO - 10.1109/JSEN.2020.3022095
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AN - SCOPUS:85098777862
SN - 1530-437X
VL - 21
SP - 3660
EP - 3668
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
IS - 3
M1 - 9187250
ER -
