Novel micromachined vibrating rate-gyroscope with optical sensing and electrostatic actuation

Keyphrases

• Photodiode 100%
• Optical Sensing 100%
• Micromachining 100%
• Electrostatic Actuation 100%
• Rate Gyroscope 100%
• Mechanical Components 33%
• Readout Electronics 33%
• Double-sided 33%
• Good Linearity 33%
• Bulk Micromachining 33%
• Rotary Table 33%
• Mode Amplitudes 33%
• Anisotropic Wet Etching 33%
• Rate Sensor 33%
• CMOS chip 33%
• Mechanical Integration 33%
• Wet Etch Process 33%
• Proof Mass 33%
• Electrical Integration 33%
• Indium Bump 33%
• Output Mode 33%

Engineering

• Photodiode 100%
• Electrostatic Actuation 100%
• Anisotropic 33%
• Etching Process 33%
• Micro Machining 33%
• Mechanical Part 33%
• Proof Mass 33%

Material Science

• Indium 100%
• Micromachining 100%
• Wet Etching 100%