Thermal performance of CMOS-SOI transistors from weak to strong inversion

Maria Malits, Dan Corcos, Alexander Svetlitza, Danny Elad, Yael Nemirovsky

Research output: Contribution to journalArticlepeer-review

Abstract

A promising solution to continue the complementary metal-oxide semiconductor (CMOS) scaling roadmap at the 22 nm technology node and beyond is CMOS-silicon on insulator (SOI), which is used especially in low-power and "system on chip" applications [1]. CMOS-SOI involves building conventional MOSFETs on very thin layers of crystalline silicon. The thin layer of silicon is separated from the substrate by a thick layer of buried SiO 2 film, thus isolating the devices from the underlying silicon substrate and from each other. CMOS-SOI technology is already a leading technology in a wide range of applications where integrated CMOS-SOI- microelectromechanical systems or nanoelectromechanical systems (MEMS/NEMS) technologies provide unique sensing systems for IR and terahertz (THz) imagers.

Original languageEnglish
Article number6314512
Pages (from-to)28-34
Number of pages7
JournalIEEE Instrumentation and Measurement Magazine
Volume15
Issue number5
DOIs
StatePublished - 2012

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Thermal performance of CMOS-SOI transistors from weak to strong inversion'. Together they form a unique fingerprint.

Cite this