Vertically integrated silicon single crystalline MEMS switch

Oren Aharon; Shai Feldman; Yael Nemirovsky

doi:10.1109/SENSOR.2005.1496635

Vertically integrated silicon single crystalline MEMS switch

Oren Aharon, Shai Feldman, Yael Nemirovsky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

DC to RF shunt contact Micro-Electro-Mechanical switch was fabricated. The fabrication of the MEMS device was preformed using bulk micromachining process of an SOI wafer followed by a vertical integration to a microwave circuit wafer. The pull-in voltage and natural frequency of the switch were characterized. Also, RF performances at both switch states were measured. The concept of a packaged switch described in this paper enables to offer a stand alone switch, independent of the RF circuit substrate material or technology being used.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1047-1050
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2005.1496635
State	Published - 2005
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	1

Conference

Conference	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Keywords

DRIE
RF-MEMS
SOI
Switch

ASJC Scopus subject areas

General Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/SENSOR.2005.1496635

Cite this

Aharon, O., Feldman, S., & Nemirovsky, Y. (2005). Vertically integrated silicon single crystalline MEMS switch. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1047-1050). Article 2E4.148 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1). https://doi.org/10.1109/SENSOR.2005.1496635

Aharon, Oren ; Feldman, Shai ; Nemirovsky, Yael. / Vertically integrated silicon single crystalline MEMS switch. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 1047-1050 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

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abstract = "DC to RF shunt contact Micro-Electro-Mechanical switch was fabricated. The fabrication of the MEMS device was preformed using bulk micromachining process of an SOI wafer followed by a vertical integration to a microwave circuit wafer. The pull-in voltage and natural frequency of the switch were characterized. Also, RF performances at both switch states were measured. The concept of a packaged switch described in this paper enables to offer a stand alone switch, independent of the RF circuit substrate material or technology being used.",

keywords = "DRIE, RF-MEMS, SOI, Switch",

author = "Oren Aharon and Shai Feldman and Yael Nemirovsky",

year = "2005",

doi = "10.1109/SENSOR.2005.1496635",

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booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",

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Aharon, O, Feldman, S & Nemirovsky, Y 2005, Vertically integrated silicon single crystalline MEMS switch. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 2E4.148, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 1, pp. 1047-1050, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1496635

Vertically integrated silicon single crystalline MEMS switch. / Aharon, Oren; Feldman, Shai; Nemirovsky, Yael.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1047-1050 2E4.148 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Aharon O, Feldman S, Nemirovsky Y. Vertically integrated silicon single crystalline MEMS switch. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1047-1050. 2E4.148. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05). doi: 10.1109/SENSOR.2005.1496635

Vertically integrated silicon single crystalline MEMS switch

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

UN SDGs

Access to Document

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