Plasma techniques in the production of customized MEMS-applications

Achim Bittner; David Hochstein; Jan Rockstroh; Jan Dehnert; Frank Hedrich; Sophie Billat; Alfons Dehé

doi:10.1002/ppap.201900047

Plasma techniques in the production of customized MEMS-applications

Achim Bittner, David Hochstein, Jan Rockstroh, Jan Dehnert, Frank Hedrich, Sophie Billat, Alfons Dehé

Research output: Contribution to journal › Review article › peer-review

2 Scopus citations

Abstract

Micro electromechanical systems (MEMS) have found their way into many kinds of applications. Especially sensors are daily used by each of us in products like cars and smartphones. The focus of Hahn-Schickard is the development and the production of highly specialized MEMS products, ones that especially enable small companies the access to MEMS technology. The portfolio includes specific inertial sensors like gyroscopes for navigation and safety, acceleration sensors for crash-test dummies, microfluidic devices for biological, and medical applications, and so on. All of these devices are manufactured in the institute's cleanroom in volumes ranging from single devices up to hundreds of thousands of chips. In this article, the multitude of application scenarios will be demonstrated by way of diverse MEMS components.

Original language	English
Article number	1900047
Journal	Plasma Processes and Polymers
Volume	16
Issue number	9
DOIs	https://doi.org/10.1002/ppap.201900047
State	Published - 1 Sep 2019
Externally published	Yes

Keywords

MEMS
microsystems technologies
sensor

ASJC Scopus subject areas

Condensed Matter Physics
Polymers and Plastics

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10.1002/ppap.201900047

Cite this

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AU - Rockstroh, Jan

AU - Dehnert, Jan

AU - Hedrich, Frank

AU - Billat, Sophie

AU - Dehé, Alfons

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AB - Micro electromechanical systems (MEMS) have found their way into many kinds of applications. Especially sensors are daily used by each of us in products like cars and smartphones. The focus of Hahn-Schickard is the development and the production of highly specialized MEMS products, ones that especially enable small companies the access to MEMS technology. The portfolio includes specific inertial sensors like gyroscopes for navigation and safety, acceleration sensors for crash-test dummies, microfluidic devices for biological, and medical applications, and so on. All of these devices are manufactured in the institute's cleanroom in volumes ranging from single devices up to hundreds of thousands of chips. In this article, the multitude of application scenarios will be demonstrated by way of diverse MEMS components.

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Plasma techniques in the production of customized MEMS-applications

Abstract

Keywords

ASJC Scopus subject areas

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