Abstract
Vertical-cavity surface emitting lasers (VCSELs) were grown by molecular beam epitaxy over openings in a SiN4 mask, deposited on a GaAs wafer. We obtained ready to use lasers and laser arrays, laterally defined by the polycrystalline, highly resistive material grown over the SiN4 laser. The performance of the lasers (e.g., 20×20 μm2 by size) were similar to that of VCSELs defined by post growth processing methods. Special transverse modes characteristics and a well defined polarization were observed in square shaped lasers and it was attributed to selective growth induced anisotropy.
Original language | English |
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Pages (from-to) | 1840-1842 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 69 |
Issue number | 13 |
DOIs | |
State | Published - 23 Sep 1996 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)